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Evaporation Materials & Sputter Targets
ChemPUR supplies high-purity evaporation materials & sputter targets for your PVD processes, thin-film technology, and research.
For Research & Thin-Film Technology
Precision for demanding coatings
At ChemPUR, you receive high-purity evaporation materials and sputter targets for your research, development, and industrial applications. Our materials are used in PVD processes, thin-film technologies, semiconductor manufacturing, and surface analysis. Thanks to many years of experience in chemistry and materials science, we supply specified products including expert advice.
Our service at ChemPUR
Whether evaporation materials or sputter targets: we provide individual advice for your application.


Discover our entire product range
Quickly find the right solution from our selection of over 4,000 metals, elements, and specialty chemicals.
Frequently Asked Questions
Our FAQs provide you with a quick overview of important topics related to our product range. If you have any further questions, we will of course also be happy to assist you personally.
Purchasing / Sales
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Which evaporation materials does ChemPUR offer?
ChemPUR offers a broad portfolio of evaporation materials for PVD thin-film technology and materials research. The focus is on a wide range of material classes and their targeted use in different applications. The range includes high-purity pure metals such as aluminum, gold, silver, or copper, as well as alloys with defined properties. The portfolio is complemented by non-metallic compounds such as oxides, sulfides, and fluorides, which are used in particular for functional layers with specific optical, electrical, or chemical properties.
This breadth covers a wide variety of requirements – from conductive coatings and protective layers to optical applications. ChemPUR supports both standard processes and specialized research applications where precisely defined material properties are decisive. A particular added value lies in the ability to provide even complex or rare materials in high purity. This creates the basis for stable processes and reproducible results in demanding thin-film applications.
Which materials are suitable for PVD processes?
Materials with defined physical and chemical properties are suitable for PVD processes, primarily in terms of evaporability, purity, and reactivity. ChemPUR offers a wide selection of metals, alloys, and compounds specifically optimized for these requirements.
Metals such as aluminum, titanium, chromium, or gold are frequently used because they enable stable and functional layers. In addition, oxides, nitrides, or other compounds are used when specific optical, electrical, or mechanical properties are required. The selection depends strongly on the respective application, for example in semiconductor technology, optics, or surface coating. A decisive factor is material purity, as even the slightest impurities can affect coating quality. At ChemPUR, we ensure that all materials are produced under strictly controlled conditions. This achieves high process stability, which is essential especially in research and high-tech industries.
In which forms are evaporation materials available?
ChemPUR evaporation materials are provided in various physical forms to enable optimal integration into different evaporation technologies. These include granules, chips, tablets (pellets), wires, and powders.
The key advantage of this variety of forms lies in adapting to the respective evaporation method and the equipment used. While compact forms such as tablets or granules support controlled and uniform material feed, finer structures such as chips enable rapid evaporation due to a larger surface area. Wires are particularly suitable for continuous processes where material must be fed consistently. Powder is used primarily in specialized or experimental applications.
By selecting the material form in a targeted manner, process stability, evaporation rate, and coating quality can be actively influenced. ChemPUR also offers individual formats and custom adaptations to precisely meet special requirements in research and industry.
Which sputter targets are available?
ChemPUR offers a broad standard range of sputter targets for applications in PVD thin-film technology. Available are targets made of metallic materials as well as alloys and ceramic materials. In addition, targets made of oxides, carbides, nitrides, or fluorides can also be provided. Depending on the material requirements, production is carried out either by casting or powder metallurgy to ensure optimal material properties and a homogeneous structure. This is crucial for stable deposition rates and uniform coating quality in the sputtering process.
Standard targets are available in various diameters, thicknesses, and geometries and can be integrated into common coating systems. An overview of the available metallic targets can be found in the downloads. By combining high material purity, precise manufacturing, and a broad range of materials, we provide you with reliable solutions for research, thin-film technology, and industrial coating processes.
Does ChemPUR offer custom targets?
Yes, ChemPUR specializes in the custom manufacture of sputter targets and offers tailored solutions for individual process requirements. In addition to the standard range, targets can be developed exactly to specifications regarding composition, purity, geometry, and dimensions. Target geometry can be flexibly adapted, with diameters up to 200 mm feasible depending on the material. This enables a precise fit for integration into existing systems and specific coating processes.
In addition, we offer further services such as metallic bonding as well as the manufacture of suitable backplates. This means you receive complete, ready-to-use target systems from a single source. Through close coordination with you and our comprehensive expertise in material processing, we create solutions precisely matched to process parameters, enabling high process stability and reproducible results.
Are bonding and backplates available from a single source?
In addition to sputter targets, ChemPUR also offers suitable bonding services and backplates, so customers receive all relevant components from a single source. This simplifies procurement and ensures that all elements are optimally matched. In bonding, the target material is securely joined to a carrier plate to ensure stable use in the sputtering process. Selecting suitable backplates and bonding methods is crucial for heat dissipation and mechanical stability during operation.
Our solutions are designed to enable a long service life and consistent process conditions. Customers benefit from reliable integration into existing systems as well as reduced downtime. By combining materials expertise and technical implementation, ChemPUR offers real added value for demanding applications, for example in semiconductor manufacturing, optical coating (e.g., mirrors and filters), sensor technology, or in research and development of thin-film systems.
Which applications are the materials suitable for?
ChemPUR evaporation materials and sputter targets are used in a wide range of applications, particularly in research, development, and high-tech industries. These include thin-film coatings in microelectronics, optical applications, sensor technology, and surface finishing.
In the semiconductor industry, these materials are used to produce functional layers with defined electrical properties. In optics, they are used to manufacture mirrors, filters, or coatings with specific light transmittance. They also play a central role in analytics and materials research. Thanks to their high purity and precise specification, our materials enable reproducible results and stable processes. This is particularly important for laboratories and research institutions that rely on reliable and accurate results. ChemPUR supports these applications with tailored solutions and in-depth expertise.